Business Field
“Large Size and Various Ceramic Parts”
CVD, ALD, Etcher 등 반도체 장비의 챔버에서 사용하는 대부분의 세라믹 소재 부품을
개발, 제조할 수 있는 기술과 경험 및 양산 시설을 확보하고 있으며,
날로 변화되고 있는 고객의 Needs에 대응할 수 있도록 신소재 개발도 지속적으로 진행하고 있습니다.
High Density
Improvement of Pore
Improvement of Pitting
Microstructure Control
Sintering Technical
Identical Material
Supreme Attria™
| Section | Hitria™ | Supreme Yttria™ | A-Tria™ | Supreme Attria™ |
|---|---|---|---|---|
Density |
Avg. |
Avg. |
Avg. |
Avg. |
Hardness |
Avg. |
Avg. |
Avg. |
Avg. |
Microstructure |
|
|
|
|
Improve of pore |
Improve of pore |
|||
| Section | Aluminum Oxide(Al2O3) | Yttrium Oxide(Y2O3) | Aluminum Nitride(AlN) Hicera™ | |
|---|---|---|---|---|
| Hitria™ | A-tria™ | |||
Purity |
99.7 |
99.9 |
95.0 |
94.0 (AI+N) |
Advantage |
High chemically and Thermal resistance Superior mechanical strength and hardness Cost down by mass production |
Good mechanical properties Excellent plasma resistance and low erosion rate |
Powerful heat transfer and fast spread High thermal shock resistance Better particle performance and longer life time |
|
 |
 |
 |
||
Application |
Fine Ceramic Ring, Tube & injector parts |
Ceramic Lids, various gas injector & nozzle Focus rings & guide-rings |
Heater tubes and various tube parts Shadow ring to guide wafer Gas injector and nozzle Life-pins and screws |
|
| Material | Application | Image |
|---|---|---|
Al2O3 |
Rings, Lids, Plates and Injector parts |
|
Y2O3 |
Rings, Lids, Showehead and Injectors parts |
|
AIN |
Rings, Tubes, Plates and Nozzle parts |
|
