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Main Business

ESC (Electrostatic Chuck)

ESC is a core part of the Etcher equipment, which is a semiconductor etching process
equipment. We have the level of experience and technology that enables joint development
with main semiconduction equipment companies as well as localization of ESC.
As we have original manufacturing technology using MLC and hot press, we develop,
manufacture and supply ESC to meet the needs of various customers.

* Consumable parts that are attached to the chamber in the Etcher equipment used in
the etching process during the semiconductor process. It hold and fix the wafe with
constant power.

1. Multi-layer ceramic (MLC) ESC
  • MiCo Ceramics’  High performance ESC are produced based on optimized inline MLC process.

  • MLC ESC are key components used in many semiconductor equipment and processes.

  • ESC design such as electrode and coolant pattern offer a various functional performance.

  • MiCo Ceramics’  MLC ESC offer optimal wafer temperature control with built-in multilayer electrodes and multi-zone heaters.

Multi-Layer Ceramic ESC
Multi-Layer Ceramic ESC Image 1 Multi-Layer Ceramic ESC Image 2 Multi-Layer Ceramic ESC Image 3
2. High performance Hot-pressed (HP) ESC
  • MiCo Ceramics’  Hot-pressed ESC has high-end ceramic properties

  • High purity ESC has high dielectric strength and relative density

  • High dielectric constant ESC generates high chucking force

  • Heaters or multi-electrodes can be embedded into ceramic plate

  • MiCo Ceramics’  HP ESC shows high durability in high density plasma etching process

High Purity ESC High Purity ESC Image High Dielectric Constant ESC High Dielectric Constant ESC Image
3. Ceramic Material Properties for MiCo Ceramics’ ESC
Grade Feature Density
(g/cm3)
Dielectric
constant
Volume resistivity
(Ω·cm)
Thermal conductivity
(W/(m*K))
Vickers hardness
(HV)

MLA

Multi layer electrode

≥ 3.8

10

≥ 1E16

24

≥ 1350

HPA

High purity ceramic

≥ 3.95

10

≥ 1E16

33

≥ 1800

HDA

High dielectric constant

≥ 3.9

14

≥ 1E15

30

≥ 2000

Try drag from side to side

Line Up
Process Detail ESC Type Remark

Dry Etch

Oxide

Mono-polar

High Density Ceramic, Multi-layer Electrode

Bi-polar

High Density Ceramic, Embedded He Channel

Poly

Mono-polar

Multi-zone Heater, Embedded Heater

Bi-polar

Multi-zone Heater, Multi-layer Electrode

Try drag from side to side